Helmut Baumgart

VMEC Professor, Old Dominion University

Dr. Helmut Baumgart’s research interests are as follows:

  • Nanotechnology,  Microelectronics Fabrication, High-k Dielectrics for Advanced Gate Stack Engineering, Atomic Layer Deposition (ALD) Technology of Electronic Thin Film Materials, Semiconductor Processing, Thin Film Growth
  • Silicon-on-Insulator (SOI) Technology and Germanium-on-Insulator (GeOI) Technology, Strain Engineering Substrates of Si1-xGex, and strained sSOI Technology for strained channel, high mobility, high performance MOSFET devices, Wafer Bonding Technology
  • ALD of ZnO for Detector and Sensor applications
  • Nanoindentation of electronic thin films, elasto-mechanical properties of electronic materials

Professional Experience:

  • Long career in the semiconductor high tech industry including positions with AT&T Bell Labs, Murray Hill, NJ; Philips Electronics Research Labs, Briarcliff, NY & Netherlands, Siemens Semiconductors, NY; IBM Advanced Semiconductor Technology Center (ASTC) Fishkill, NY; Infineon Technologies, VA; Motorola Advanced Products Research & Development Laboratories (APRDL) Austin, Texas
  • Authored and co-authored 62 papers
  • Published and edited 8 Electrochemical Society Conference Proceedings
  • Organizer of the ECS International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications
  • Delivered 27 conference presentations, including numerous invited and keynote talks
  • Holds 5 US patents, 4 Japanese patents, 4 European patents and 15 Patent Disclosures


  • 2002 Motorola Award: Most significant contribution to 202 D0 Goals
  • 2001 Infineon Technologies: Special Recognition Award
  • 1989 Philips Electronics: Special Merit Award
  • 1985 Philips Electronics: Special Merit Award
  • 1984 Philips Electronics: President’s Making a Difference Award
  • Fulbright Scholar at Purdue University


  • PhD in Physics, University of Stuttgart
  • MS in Physics, Purdue University (Fulbright Scholar)