Helmut Baumgart

VMEC Professor, Old Dominion University
hbaumgar@odu.edu

Dr. Helmut Baumgart’s research interests are as follows:

Nanotechnology, Microelectronics Fabrication, High-k Dielectrics for Advanced Gate Stack Engineering, Atomic Layer Deposition (ALD) Technology of Electronic Thin Film Materials, Semiconductor Processing, Thin Film Growth
Silicon-on-Insulator (SOI) Technology and Germanium-on-Insulator (GeOI) Technology, Strain Engineering Substrates of Si₁-xGe_x, and strained sSOI Technology for strained channel, high mobility, high performance MOSFET devices, Wafer Bonding Technology
ALD of ZnO for Detector and Sensor applications
Nanoindentation of electronic thin films, elasto-mechanical properties of electronic materials

Professional Experience:

Long career in the semiconductor high tech industry including positions with AT&T Bell Labs, Murray Hill, NJ; Philips Electronics Research Labs, Briarcliff, NY & Netherlands, Siemens Semiconductors, NY; IBM Advanced Semiconductor Technology Center (ASTC) Fishkill, NY; Infineon Technologies, VA; Motorola Advanced Products Research & Development Laboratories (APRDL) Austin, Texas
Authored and co-authored 62 papers
Published and edited 8 Electrochemical Society Conference Proceedings
Organizer of the ECS International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications
Delivered 27 conference presentations, including numerous invited and keynote talks
Holds 5 US patents, 4 Japanese patents, 4 European patents and 15 Patent Disclosures

Awards:

Education: